| 2024-07 |
Control of selective SiGe etching by enhanced formation of hydroxyl radicals and by surface passivation in peracetic acid solution |
Applied Surface Science
|
| 2024-06 |
Understanding the contributions of F–, HF, and HF2– to the etching of SiO2 and unveiling the reaction kinetics to represent etching behavior of SiO2 up to pH 5 |
Applied Surface Science
|
| 2024-02 |
Behavior of oxide regrowth during the selective Si3N4 etching process on 3D NAND structures using finite element computational simulations |
Journal of Industrial and Engineering Chemistry
|
| 2024-01 |
Enhancement of selective SiGe dissolution through facilitated surface oxidation by formation of hydroxyl radicals in peracetic acid solution |
Applied Surface Science
|
| 2023-11 |
Effect of addition of amino acids with hydrophilic side chains to low-concentration H3PO4 for improvement of Si3N4 etching kinetics and oxide regrowth phenomena on multi-layered Si3N4/SiO2 structures |
Applied Surface Science
|
| 2023-10 |
Adsorption of poly(oxyethylene) and hydroxyl group-containing nonionic surfactants on silica particles in NH4OH solution and its effect on the interaction force with Si surface |
Colloids and Surfaces A: Physicochemical and Engineering Aspects
|
| 2023-10 |
Effect of dissolved oxygen on surface oxidation and dissolution of InGaAs and its impact on AsGa, AsIn, and VAs defect generation |
Materials Science in Semiconductor Processing
|
| 2023-05 |
Improvement of Si3N4/SiO2 etching selectivity through the passivation of SiO2 surface in aromatic carboxylic acid-added H3PO4 solutions for the 3D NAND integration |
Applied Surface Science
|
| 2023-01 |
Passivation of poly-Si surface using vinyl and epoxy group additives for selective Si3N4 etching in H3PO4 solution |
Applied Surface Science
|
| 2022-12 |
Improvement of SiO2 surface morphology during the selective Si3N4 etching in the multi-layered 3D NAND Si3N4/SiO2 stack structures by the generation of CO2 gas through the control of redox reaction |
Surfaces and Interfaces
|
| 2022-10 |
Chemical modification of subcritical water for the dissolution of Si3N4 layer in the fabrication of microelectronic devices |
JOURNAL OF SUPERCRITICAL FLUIDS
|
| 2022-10 |
Inkjet-printed p-type CuBrxI1-x:: wearable thin-film transistors |
Materials Advances
|
| 2022-07 |
Control of adhesion and desorption behavior of silica particles on InGaAs surfaces by addition of hexadecyltrimethylammonium bromide in ammonium hydroxide–hydrogen peroxide mixture solution |
APPLIED SURFACE SCIENCE
|
| 2022-06 |
Control Of Particle Adhesion On InGaAs Surface In Basic Solution By The Addition Of Cationic Surfactant |
ECS Transactions
|
| 2022-06 |
Si3N4 Etching with Carboxylic-Acid-Containing Superheated Water |
ECS Transactions
|
| 2022-06 |
Understanding of Etching Mechanism of Si3N4 Film in H3PO4Solution For The Fabrication of 3D NAND Devices |
ECS Transactions
|
| 2021-11 |
Addition of Carboxylic Acids to Superheated Water for the Environmentally Benign Removal of Silicon Nitrides |
ACS SUSTAINABLE CHEMISTRY & ENGINEERING
|
| 2021-10 |
Understanding of Si3N4-H3PO4 reaction chemistry for the control of Si3N4 dissolution kinetics |
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
|
| 2021-10 |
Phosphoric acid-peroxide mixture surface preparation for the improvement of InGaAs channel characteristics |
Journal of Industrial and Engineering Chemistry
|
| 2021-01 |
Interfacial ZnS passivation for improvement of transparent ZnO/CuI diode characteristics |
APPLIED SURFACE SCIENCE
|
| 2020-09 |
Hexene passivation on a p-type Zn-doped InGaAs surface |
MATERIALS CHEMISTRY AND PHYSICS
|
| 2020-01 |
Oxide regrowth mechanism during silicon nitride etching in vertical 3D NAND structures |
MICROELECTRONIC ENGINEERING
|
| 2019-12 |
Addition of nitrate to superheated water and its reaction mechanism with C-C cross-linked ion-implanted photoresists |
APPLIED SURFACE SCIENCE
|
| 2019-09 |
Removal of high-dose P+ ion-implanted photoresist on GaAs in the mixture of dimethyl sulfoxide and acetonitrile |
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
|
| 2019-05 |
Control of Si3N4 etching kinetics and selectivity to SiO2 by the additives in superheated water |
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
|
| 2019-05 |
Elemental behaviors of InGaAs surface after treatment in aqueous solutions |
MICROELECTRONIC ENGINEERING
|
| 2018-11 |
Polarization behavior of polyvinylidene fluoride films with the addition of reduced graphene oxide |
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
|
| 2018-09 |
Improvement in the photovoltaic performance of a dye-sensitized solar cell by the addition of CeO2:Gd nanoparticles in the photoanode |
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
|
| 2018-03 |
Improvement in current density of nano- and micro-structured Si solar cells by cost-effective elastomeric stamp process |
AIP ADVANCES
|
| 2017-07 |
Fabrication of dye-sensitized solar cells using a both-ends-opened TiO2 nanotube/nanoparticle hetero-nanostructure |
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
|
| 2017-06 |
Reduction of ?Si≡Si3 defect density at the Si/SiO2 interface by sol-gel SiO2 thin film passivation |
THIN SOLID FILMS
|
| 2017-04 |
Oxidation and etching behaviors of the InAs surface in various acidic and basic chemical solutions |
SURFACE SCIENCE
|
| 2017-03 |
Behavior of GaSb (100) and InSb (100) surfaces in the presence of H2O2 in acidic and basic cleaning solutions |
APPLIED SURFACE SCIENCE
|
| 2016-07 |
Removal of ion-implanted photoresists on GaAs using two organic solvents in sequence |
APPLIED SURFACE SCIENCE
|
| 2016-05 |
Metal-assisted chemical etching of Ge surface and its effect on photovoltaic devices |
APPLIED SURFACE SCIENCE
|
| 2016-04 |
Energy Harvesting delta-Phase Polyvinylidene-Fluoride Sponge |
SCIENCE OF ADVANCED MATERIALS
|
| 2015-11 |
Behavior of a GaSb (100) Surface in the Presence of H2O2 in Wet-Etching Solutions |
JOURNAL OF PHYSICAL CHEMISTRY C
|
| 2015-11 |
Preparation of Periodically Arrayed Silicon Microwires Using Simple Patterning Process |
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
|
| 2015-09 |
Improvement of Cu2ZnSnS4 thin film properties by a modified sulfurization process |
THIN SOLID FILMS
|
| 2015-08 |
Electron Beam-Treated ZnO Thin Film as an Anti-Reflection Layer for Crystalline Si Solar Cells |
SCIENCE OF ADVANCED MATERIALS
|
| 2015-06 |
Enhanced absorption and short circuit current density of selective emitter solar cell using double textured structure |
SOLAR ENERGY
|
| 2015-03 |
Improvement in electrical properties of sol?gel-derived In-doped ZnO thin film by electron beam treatment |
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
|
| 2014-08 |
Surface modification of a MoSiON phase shift mask to reduce critical dimension variation after exposure to a 193-nm ArF excimer laser |
APPLIED SURFACE SCIENCE
|
| 2014-08 |
Control of metal salt ratio and MoS2 layer thickness in a Cu2ZnSnS4 thin film solar cell |
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
|
| 2014-06 |
Effect of energetic electron beam treatment on Ga-doped ZnO thin films |
CURRENT APPLIED PHYSICS
|
| 2014-04 |
Ultrafast Crystallization of Amorphous Silicon Thin Films by Using an Electron Beam Annealing Method |
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
|
| 2014-04 |
Selective wet etching of Si3N4/SiO2 in phosphoric acid with the addition of fluoride and silicic compounds |
MICROELECTRONIC ENGINEERING
|
| 2013-12 |
Effect of energetic electron beam treatment on transparent conductive ZnO thin films |
THIN SOLID FILMS
|
| 2013-10 |
Effect of sulfur and copper amounts in sol-gel precursor solution on the growth, crystal properties, and optical properties of Cu2ZnSnS4 films |
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
|
| 2013-10 |
Surface modification of the MoSiON phase shift mask to reduce critical dimension variation |
APPLIED SURFACE SCIENCE
|
| 2013-08 |
Synthesis of arsenic-doped p-type ZnO films by addition of As2O3 to the ZnO spin coating solution |
SOLID STATE COMMUNICATIONS
|
| 2013-01 |
ZnO nanowire-based glucose biosensors with different coupling agents |
APPLIED SURFACE SCIENCE
|
| 2013-01 |
Reversible wettability control of silicon nanowire surfaces: From superhydrophilicity to superhydrophobicity |
THIN SOLID FILMS
|
| 2012-06 |
Effects of ZnO nanowire synthesis parameters on the photovoltaic performance of dye-sensitized solar cells |
THIN SOLID FILMS
|
| 2012-04 |
Successive ionic layer adsorption and reaction of ZnSe shells for ZnO nanowire-based dye-sensitized solar cells |
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
|
| 2012-03 |
Effect of post-etch cleaning on Ru-capped extreme ultraviolet lithography photomask |
APPLIED SURFACE SCIENCE
|
| 2011-12 |
Synthesis of ZnO nanospheres with uniform nanopores by a hydrothermal process |
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
|
| 2011-11 |
Kinetic Study on the Wet Etching of La2O3 in Acidic Solutions |
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
|
| 2011-10 |
Behavior of Ru surfaces after ozonated water treatment |
APPLIED SURFACE SCIENCE
|
| 2011-08 |
Effect of Al-doping on the structure and optical properties of electrospun zinc oxide nanofiber films |
JOURNAL OF COLLOID AND INTERFACE SCIENCE
|
| 2011-04 |
Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO2 surface |
APPLIED SURFACE SCIENCE
|
| 2011-04 |
Etch Behavior of ALD Al2O3 on HfSiO and HfSiON Stacks in Acidic and Basic Etchants |
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
|
| 2011-02 |
Improved conversion efficiency in dye-sensitized solar cells based on electrospun Al-doped ZnO nanofiber electrodes prepared by seed layer treatment |
JOURNAL OF SOLID STATE CHEMISTRY
|
| 2010-12 |
Synthesis of a ZnS Shell on the ZnO Nanowire and Its Effect on the Nanowire-Based Dye-Sensitized Solar Cells |
JOURNAL OF PHYSICAL CHEMISTRY C
|
| 2010-12 |
Improvement of ZnO nanorod-based dye-sensitized solar cell efficiency by Al-doping |
Journal of Physics and Chemistry of Solids
|
| 2010-06 |
Improvement of optical properties of post-annealed ZnO nanorods |
Physica E-Low-Dimensional Systems & Nanostructures
|
| 2010-06 |
Annealing effects of ZnO nanorods on dye-sensitized solar cell efficiency |
Physica B-Condensed Matter
|
| 2010-05 |
Atomic layer deposition of HfO2 on self-assembled monolayer-passivated Ge surfaces |
Thin Solid Films
|
| 2010-03 |
Improvement in the optical absorption of PECVD microcrystalline Si thin film through modification of the crystalline fraction through an annealing process |
Physica B-Condensed Matter
|
| 2010-01 |
Hydrothermal synthesis of Al-doped ZnO nanorod arrays on Si substrate |
Physica B-Condensed Matter
|
| 2009-12 |
Direct indium tin oxide patterning using thermal nanoimprint lithography for highly efficient optoelectronic devices |
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
|
| 2009-11 |
Influence of Sn-doping in hydrothermal methods on the optical property of the ZnO nanorods |
Physica E-Low-Dimensional Systems & Nanostructures
|
| 2009-09 |
Multiple internal reflection Fourier transform-infrared spectroscopy study on Si surface for measurement of PSL particles |
Journal of Industrial and Engineering Chemistry
|
| 2009-06 |
Effect of Si wafer resistivity on the growth of ZnO nanorods |
Thin Solid Films
|
| 2009-05 |
Effect of Isopropyl Alcohol Addition in Ozonated Water on the Corrosion of Tungsten Film |
Japanese Journal of Applied Physics
|
| 2009-05 |
Selective Growth of Vertical ZnO Nanowires with the Control of Hydrothermal Synthesis and Nano-Imprint Technology |
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
|
| 2009-03 |
Effect of modification of S-terminated Ge(100) surface on ALD HfO2 gate stack |
Applied Surface Science
|
| 2009-02 |
High photocatalytic activity of silver-loaded ZnO-SnO2 coupled catalysts |
Chemical Engineering Journal
|
| 2008-12 |
Oxidation of hydrogen terminated Ge(100) surface in the presence of iodine in methanol |
APPLIED SURFACE SCIENCE
|
| 2008-09 |
Effect of Ge surface termination on oxidation behavior |
APPLIED SURFACE SCIENCE
|
| 2008-09 |
Effect of surface preparation on the morphology of ZnO nanorods |
Physica B-Condensed Matter
|
| 2008-09 |
Effect of HAc and IPA addition in ozonated water cleaning system for ArF photoresist removal |
Journal of the Electrochemical Society
|
| 2008-08 |
Crystallization and dielectric properties of low temperature dielectrics containing Li2O filler |
Journal of Non-Crystalline Solids
|
| 2008-05 |
Effect of hydrothermal reaction conditions on the optical properties of ZnO nanorods |
Physica B-Condensed Matter
|
| 2008-05 |
Oxidation mechanism of hydrogen-terminated Ge(100) surface |
APPLIED SURFACE SCIENCE
|
| 2008-03 |
Role of OH- in the low temperature hydrothermal synthesis of ZnO nanorods |
Journal Of Chemical Technology And Biotechnology
|
| 2008-02 |
Microstructural and optical characteristics of solution-grown Ga-doped ZnO nanorod arrays |
Nanotechnology
|
| 2008-01 |
Effect of wafer resistivity and HF concentration on the formation of vertically aligned porous silicon |
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
|
| 2008-01 |
Improvement of photoresist removal efficiency in ozonated water cleaning system |
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
|
| 2008-01 |
Modification of H-terminated Ge surface in hydrochloric acid |
APPLIED SURFACE SCIENCE
|
| 2007-11 |
Improvement of the optical properties of ZnO nanorods by Fe doping |
PHYSICA B-CONDENSED MATTER
|
| 2007-01 |
Effect of seed layer on the growth of ZnO nanorods |
JOURNAL OF PHYSICAL CHEMISTRY C
|